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| 210 | 0 | _aJ. vac. sci. technol. | |
| 222 | 0 | _aJournal of vacuum science [and] technology | |
| 245 | 0 | 0 | _aJournal of vacuum science [and] technology |
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_aNew York : _bAmerican Vacuum Society, _c1964-1982 |
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_aTECNOLOGIA DEL VACIO _922073 _2EIT |
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_iCont. parc. p _tJournal of vacuum science [and] technology. A. Vacuum, surfaces and film _x0734-2101 |
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