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| 210 | 0 | _aIEEE trans. semicond. manuf. | |
| 222 | 0 | _aIEEE transactions on semiconductor manufacturing | |
| 245 | 0 | 0 | _aIEEE transactions on semiconductor manufacturing |
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_aNew York : _bInstitute of Electrical and Electronics, _c1988- |
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_aInstitute of Electrical and Electronics _gOtra forma del nombre: IEEE |
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