Microlithography : process technology for IC fabrication
By: Elliott, David J
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Material type: 
BookPublisher: New York : McGraw-Hill, c1986Description: XIX, 378 p. : il., fotos, gráfs., tablas ; 23 cm.ISBN: 0070193045.Subject(s): VLSI | CONSTRUCCION | DISEÑO | LITOGRAFIA | CIRCUITOS INTEGRADOS | CIRCUITOS ELECTRONICOS | ELECTRONICAOther classification: E46
| Item type | Current location | Home library | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
Libros de Estante de Entrada
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Biblioteca Central | Biblioteca Central | 621.38, E46 (Browse shelf) | Available | P23977 |
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